ASML Confirms Next Generation EUV Tools Are Ready for High Volume Chip Manufacturing

Published: 27 Feb 2026

ASML has announced that its next-generation extreme ultraviolet lithography machines are now technically prepared for high-volume chip production. The development marks a critical step for the semiconductor industry as chipmakers race to meet growing demand for advanced artificial intelligence processors.

ASML Reaches a Major Chipmaking Milestone

The Dutch semiconductor equipment leader ASML says its High NA EUV lithography tools have reached a level of performance that allows chip manufacturers to begin using them at scale. The machines have already processed roughly half a million silicon wafers, demonstrating stability, accuracy, and reduced downtime during extended testing.

ASML is the only company globally capable of producing EUV lithography systems, which are essential for manufacturing the most advanced chips used in AI computing, smartphones, and data centers.

Why High NA EUV Matters for AI Chips

As chip designs become more complex, current EUV technology is nearing its physical limits. The High NA systems enable more precise circuit patterning, allowing manufacturers to produce smaller, faster, and more energy-efficient chips. This capability is considered vital for the next wave of AI processors powering large language models and advanced automation.

Leading chipmakers such as Taiwan Semiconductor Manufacturing and Intel are expected to be among the early adopters of the new tools.

Adoption Will Take Time

Despite the technical readiness, ASML cautioned that widespread manufacturing adoption will not be immediate. Semiconductor companies typically require extensive qualification and testing before fully integrating new equipment into production lines. ASML estimates this process could take two to three years before the tools are fully embedded into large scale manufacturing.

Each High NA EUV system carries a price of around $400 million, reflecting both its engineering complexity and strategic importance to the global chip supply chain.

A Strategic Shift for the Semiconductor Industry

The readiness of High NA EUV tools signals a turning point for chip production, especially as demand for AI infrastructure accelerates worldwide. By reducing manufacturing steps and increasing efficiency, the technology is expected to play a central role in keeping AI innovation on schedule over the coming decade.

ASML plans to release detailed performance data at an upcoming technical conference, offering further insight into how the new machines can reshape advanced chip manufacturing.

Source:

Reuters